Semiconductor sensor for a dynamic size

Acceleration sensor a mass (301, 302, 303) which is on a semiconductor substrate (1) attached by bars (B1, B2, B3, B4) and is displaced in accordance with the application of a dynamic quantity, wherein the dynamic quantity based on a change in a electrical characteristic between each of the movable electrodes (ME1, ME2, ME3, ME4), which with the mass (301, 302, 303) are formed integrally, and each of the fixed electrodes (FE1, FE2, FE3, FE4) is detected, which at one end thereof from the semiconductor substrate (1) are held, wherein the mass (301, 302, 303) includes a plurality of divided masses (301, 302, 303) contains, which are arranged in series, which occur in the plurality of divided masses interconnected by connecting beams (CB1, CB2, CB3, CB4) are, which make it possible that the occurring in the plurality of divided masses (301, 302, 303) are moved to approach each other or move away from each other, occurring in the plurality of divided masses (301, 302, 303) first to third masses (301, 302, 303) included in series in order to detect the application of the dynamic quantity in directions of two orthogonal axes (X, Y), which is a include the X-axis (X) and a direction of Y-axis (Y), the located on both ends of the ground first and third masses (301, 303) on the semiconductor substrate (1) by bars (B1, B2, B3, B4) attached to a shift in the direction of the X-axis (X) orthogonal to the direction of Y-axis (Y) to enable, in which the first to third masses (301, 302, 303) are connected to each other, wherein the first to third masses (301, 302, 303), the movable electrodes (ME1, ME3, ME4, ME2) have, the integrated (301 with the respective masses, 302, 303) are formed so as to detect an application of a dynamic size in the direction in which a displacement occurring in the plurality of divided masses (301 , 302, 303) is provided, the second mass (302) connected to the first and third masses (301, 303) by connection beams (CB1, CB2, CB3, CB4) is connected to at the middle position between the first and third masses (301, 303). ..