A Study of Microstructure of CrAlTiN Coatings Prepared by Magnetron Sputtering

The phase composition,chemical states and cross-section microstructure of CrAlTiN coatings are comprehensively analyzed by XRD,XPS and HRTEM.The results show that CrAlTiN coating has a clear nanoscale multilayer structure with the periodicity of about 4.9nm.CrAlTiN coating is a composite coating composed of CrN type metal nitrides(CrN,AlN and TiN) mainly,and a small quantity of Cr、 Al and M2O3 metal oxides(Cr2O3,Al2O3 and Ti2O3).The formation of CrN type metal nitrides is that a partial of Cr atoms in CrN crystal lattice are substituted by Al and Ti atoms.