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Effect Of Cl Incorporation On The Performance Of Amorphous Silicon Thin Film Transistor
Effect Of Cl Incorporation On The Performance Of Amorphous Silicon Thin Film Transistor
1997
Jong Hyun Choi
Chang Soo Kim
Sung Ki Kim
Jin Jang
Keywords:
Amorphous silicon
Oxide thin-film transistor
Leakage (electronics)
Thin-film transistor
Photoconductivity
Threshold voltage
Optoelectronics
Nanocrystalline silicon
Carbon film
Materials science
Composite material
Hydrogen
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