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Effect of Poly Silicon Wettability on Organic Type Defects in Poly CMP
Effect of Poly Silicon Wettability on Organic Type Defects in Poly CMP
2006
Yi-Koan Hong
Young-Jae Kang
Jin-Goo Park
Sang-Yeob Han
Seong Kyu Yun
Bo-Un Yoon
Chang Ki Hong
Keywords:
Wetting
Silicon
Organic chemistry
Materials science
Inorganic chemistry
Chemical engineering
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