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Optical element surface defects detection and quantitative evaluation standard based on dark-field imaging
Optical element surface defects detection and quantitative evaluation standard based on dark-field imaging
2021
Yongying Yang
Weimin Lou
Pengfei Zhang
Fanyi Wang
Zichen Lu
Pin Cao
Jiabin Jiang
Xiang Xiao
Keywords:
surface
Dark field microscopy
Optics
Element (category theory)
Materials science
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