Compensation Research of Engine Oil Pressure Sensor Based on MEMS

The engine lubrication system plays an important role in the engine working process. Engine electronic oil pressure sensor based on piezoresistor pressure sensor MEMS with contactless measure technology is designed in this paper. This sensor includes a signal disposal chip which provides zero point pressure compensation, temperature compensation and sensitivity compensation and a chip which is used to adjust the duty cycle according to the output voltage of the signal disposal chip. The experiments show that the Engine electronic oil pressure sensor works well with excellent characteristic.