Hybridization of Love surface acoustic waves in SiO2/ST-Quartz structure with resonant pillars grafted on the meta-surface

The control of propagating waves can be achieved by introducing defect states in the phononic structure of the electroacoustic devices. This work investigates the interaction of Love waves in cavity-containing holey SiO2/Quartz structure with grafted Ni pillars. An optimal sized cavity in the holey PnC enables to obtain a cavity mode that matches the torsional resonance mode of the pillars. We showed that the cavity mode/Pillar resonance coupling depends drastically on the positions of pillars related to nodes and anti-nodes of the cavity mode. These effects are used to design a micro-electromechanical resonator presenting high quality factor without increasing the crystal size in comparison to cavity without pillars.