High-order resonance type quartz tuning fork micro-cantilever and manufacturing method thereof

The invention relates to a high-order resonance type quartz tuning fork micro-cantilever and a manufacturing method thereof. The high-order resonance type quartz tuning fork micro-cantilever comprises a quartz tuning fork body. The quartz tuning fork body comprises a tuning fork basal part, a vibration arm and a fixed arm. The vibration arm and the fixed arm are connected with the tuning fork basal part. The thickness of the vibration arm is smaller than the thickness of the fixed arm by d mm. The sum of the thickness of the vibration arm, the thickness of the fixed arm and the gap between the vibration arm and the fixed arm is equal to the thickness of the quartz tuning fork body. In this way, the high-order eigen frequency of the high-order resonance type quartz tuning fork micro-cantilever is an integer multiple of the base frequency, wherein d is larger than 0 and smaller than the thickness of the fixed arm. According to the technical scheme of the invention, the coupling of the oscillation frequency in the high-order eigen mode with the base frequency is tuned. Therefore, more frequency signals, besides base-frequency signals, can be detected. Moreover, the sensitivity and the resolution are higher. As a result, the force non-linear detection between a needle point and a sample and more physical properties of the sample can be realized.