A New NBTI Lifetime Model (Ig-model) and an Investigation on Oxide Thickness Effect on NBTI Degradation and Recovery

A new Ig-model is proposed to quickly and precisely predict NBTI lifetime for ultra thin oxide (<= 3.0nm). The oxide thickness effect on NBTI degradation, recovery and lifetime prediction model are systematically investigated. The mechanism of the NBTI degradation and recovery dependence on oxide thickness is explained as the two-side hydrogen reaction-diffusion mechanism.