A 35-GHz, 0.8-A/W and 26-µm Misalignment Tolerance Microlens-Integrated p-i-n Photodiodes

We fabricated a p-i-n photodiode (PD) with an integrated microlens, and demonstrated its high performance capabilities including high speed (35GHz), high responsivity (0.8A/W), and large misalignment tolerance (26µm), and an error-free 25-Gbit/s 10-km single-mode fiber transmission by using a 100-Gbit/s Ethernet quadplexer receiver module with the PDs.