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Copper wiring with improved electromigration resistance and reduced defect sensitivity
Copper wiring with improved electromigration resistance and reduced defect sensitivity
1998
Leon Ashley
Hormazdyar Minocher Dalal
Du Binh Danbury Nguyen
Hazara S. Rathore
Richard G. Smith
Alexander J. Swinton
Richard A. Wachnik
Keywords:
Electromigration
Materials science
Copper-wiring
Composite material
Correction
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