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Advanced technique for improving crystalline quality of GaN using multi stripe mask by hydride vapor phase epitaxy
Advanced technique for improving crystalline quality of GaN using multi stripe mask by hydride vapor phase epitaxy
2019
Hiroki Ikeuchi
Takushi Kaneko
Ryo Inomoto
Narihito Okada
Kazuyuki Tadatomo
Keywords:
Optoelectronics
vapor phase
Hydride
Crystal
Materials science
Epitaxy
Correction
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