Measurement of periodicity and strain in arrays of single crystal silicon and pseudomorphic Si1−xGex/Si fin structures using x-ray reciprocal space maps

College of Nanoscale Science and Engineering, SUNY, New York 12203 GLOBALFOUNDRIES, Albany, New York 12203 Jordan Valley Semiconductors Inc., 3913 Todd Lane, Suite 106, Austin, Texas 78744 Advanced Photon Source, Argonne National Laboratory, 9700S Cass Ave., Argonne, Illinois 60439