A micro-etching process for microwave micro-discharge effect in suppressing member
2012
The present invention discloses a micro-etching process for microwave micro-discharge effect of inhibiting member, the core of this approach is based on microwave components to ensure good conductivity, the method of using a chemical micro-etching the surface of silver-plated aluminum, the microwave It means a smooth surface of silver nanoparticles of the trap structure, thereby suppressing the secondary electron emission surface microwave components, in order to improve the micro-discharge threshold, the purpose of inhibiting micro-discharge. The method mainly includes the following processing steps: the necessary rinsing the microwave component, by using Fe (NO3) 3 etching solution to form silver nanoparticles in the surface structure member; and then soaked in 50% hydrochloric acid is removed Fe3 +. The conventional method of microwave treatment process, good convergence means, secondary electron emission coefficient of the surface of the microwave component was significantly suppressed, the micro-discharge threshold member also significantly improved.
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