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Suppression of polycrystalline formation for thick-GaN growth by Oxide Vapor Phase Epitaxy
Suppression of polycrystalline formation for thick-GaN growth by Oxide Vapor Phase Epitaxy
2017
Yoshikazu Gunji
Yohei Yamagucji
Yuki Taniyama
Akira Kitamoto
Masayuki Imanishi
Mamoru Imade
Masashi Isemura
Yusuke Mori
Keywords:
Oxide
Epitaxy
Crystallite
Semiconductor
Inorganic chemistry
Materials science
Optoelectronics
vapor phase
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