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A Low Parasitics Metal Thin Film Package for RF-MEMS 0-level
A Low Parasitics Metal Thin Film Package for RF-MEMS 0-level
2014
Abedel Zahr
Ling Yan Zhang
C. Dorion
Romain Stefanini
Pierre Blondy
Keywords:
Thin film
Electronic engineering
Parasitic extraction
Microelectromechanical systems
Materials science
Metal
Optoelectronics
metal thin film
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