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High Aspect Ratio Silicon Nanopillar Structure Fabricated by Neutral Beam Etching and Bio-template
High Aspect Ratio Silicon Nanopillar Structure Fabricated by Neutral Beam Etching and Bio-template
2018
Daisuke Ohori
Kazuhiko Endo
Seiji Samukawa
Keywords:
Etching
Beam (structure)
Aspect ratio (aeronautics)
Nanopillar
Analytical chemistry
Silicon
Materials science
Optoelectronics
Correction
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