Laser cleaning equipment and method for sol-gel membrane surface
2010
The invention relates to laser cleaning equipment and a laser cleaning method for a sol-gel membrane surface and belongs to the technical field of optical materials and laser. The cleaning equipment comprises a pulse laser, a chopping board, a lens, a two-dimensional movement platform, a collimation laser, an energy meter, a stepping motor and a computer; a sample is arranged at the two-dimensional movement platform with micron resolution, the computer is connected with the pulse laser and the stepping motor respectively through a cable and controls the pulse laser and the stepping motor, andthe stepping motor controls the two-dimensional movement platform; pulse laser emitted by the pulse laser is divided into two beams, namely probe light and main laser after passing through the chapping board; the probe light enters the energy meter; and the main laser reaches the two-dimensional movement platform after being focused through the lens; and collimation light generated by the collimation laser reaches the chopping board and is superposed with the main laser, and the position of the main laser is judged through the collimation light. The equipment has the advantages of avoiding secondary pollution, prolonging service life of coating film elements, not leaving a dead angle and damaging the membrane surface, along with high cleaning efficiency and the like.
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