Material property characterization and integration issues for mesoporous silica

SEMATECH is driving the development of new characterization methodologies that are applicable to mesoporous materials. The results from the characterization of AlliedSignal's first xerogel material (Nanoglass K2.2-A10B) illustrate the capabilities of these techniques. The characterization results, together with single-level metal Cu/damascene integration studies, demonstrate the issues involved with these potential ultra-low k materials.