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Ta-Ni Compound EUV Absorber Material to Mitigate Shadowing Effect and Improve Chemical Durability
Ta-Ni Compound EUV Absorber Material to Mitigate Shadowing Effect and Improve Chemical Durability
2016
Jinho Ahn
Dong Gon Woo
Seongchul Hong
Jung Sic Kim
Chul-Kyu Yang
Jong Hwa Lee
Chul Shin
Keywords:
Composite material
Metallurgy
Materials science
Extreme ultraviolet lithography
Durability
Correction
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