Fabrication of Channel Waveguide and Submicron χ(2) Grating by Direct Electron-beam Writing Method in Azo-dye-substituted Polymer

Abstract The study of poled azo-dye-substituted polymers using direct electron-beam exposure technique is demonstrated. The mechanism of absorption spectrum change and decay of nonlinearity of polymer films via direct EB irradiation are investigated. Channel waveguide and submicron χ(2) grating are successfully fabricated.