Fabrication of micron and submicron gratings by using plasma treatment on the curved polydimethylsiloxane surfaces

Abstract Here, a simple and low-cost fabrication strategy to efficiently construct well-ordered micron and submicron gratings on polymeric substrates by oxygen plasma treatment is reported. The Polydimethylsiloxane (PDMS) substrate is prepared on the polyethylene (PET) by spin-coating method, then the curved PDMS-PET substrates are processed in oxygen plasma. After appropriate surface treatment time in plasma the curved substrates are flattened, and well-ordered wrinkling shape gratings are obtained, due to the mechanical buckling instability. It is also demonstrated that changing the curvature radius of PDMS-PET substrates and the time of plasma treatment, the period of the wrinkling patterns and the amplitude of grating also change accordingly. It is found the period of the wrinkling patterns increased with the radius of curvature; while the amplitude decreased with that. It also shows good optical performance in transmittance diffraction testing experiments. Thus the well-ordered grating approach may further develop portable and economical applications and offer a valuable method to fabricate other optical micro strain gauges devices.