Deposition apparatus of the metal oxide film, a manufacturing method and a metal oxide film of the metal oxide film

In the film forming apparatus according to an embodiment of the present invention (100), a first solution container (5A), a second solution container (5B), the reaction vessel (1), the first path (L1) and second the path (L2), comprising. The first solution container (5A) has entered the material solution (10) containing a metal. The second solution container (5B), which contains hydrogen peroxide. Reaction vessel (1) comprises a substrate (2) is arranged, having a heating device for heating the substrate (3). First path (L1) is a material solution (11) is supplied from a first solution container (5A) to the reaction vessel (1). Second path (L2) is hydrogen peroxide, supplied to the reaction vessel (1) from the second solution container (5B).