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Pulsed Magnetron Sputtering Deposition of DLC Films
Pulsed Magnetron Sputtering Deposition of DLC Films
2003
Hui Gon Chun
Jing-Hyuk Lee
Yong Zoo You
Yong-Duek Ko
Tong-Yul Cho
Keywords:
Sputter deposition
Nanotechnology
Metallurgy
Geography
Deposition (law)
Materials science
Correction
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