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Growth kinetics of GaAs in the lateral vapor-phase epitaxy in a chloride system
Growth kinetics of GaAs in the lateral vapor-phase epitaxy in a chloride system
1995
S. Yu. Vladimirova
I. V. Ivonin
Yu. G. Kataev
L. G. Lavrenteva
L. P. Porokhovnichenko
Keywords:
Analytical chemistry
Chloride
vapor phase
Materials science
growth kinetics
Epitaxy
Correction
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