Preparation of Barium Strontium Titanate Thin Films by Liquid Source Chemical Vapor Deposition

Manganese-doped barium strontium titanate ((Ba, Sr) TiO3) thin films were prepared on platinum coated magnesium oxide single-crystal substrates at 650°C by single liquid source chemical vapor deposition. These thin films showed a dielectric constant of 200 and a dielectric loss of 2% at 100 mV and 1 kHz. The leakage current of (Ba, Sr) TiO3 films were decreased about three order of magnitude by Mn doping.