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Silicon Nanowire Arrays Combining Nanosphere Lithography and Metal-Assisted Etching
Silicon Nanowire Arrays Combining Nanosphere Lithography and Metal-Assisted Etching
2011
Claude Lévy-Clément
X. Wang
Patrick Pittet
Keywords:
Nanosphere lithography
Etching
Nanowire
Metal
Analytical chemistry
Materials science
Silicon
Nanotechnology
silicon nanowires
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