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Effect of Carrier gas$(N_2,\;He)$ on MOCVD TiN Formation
Effect of Carrier gas$(N_2,\;He)$ on MOCVD TiN Formation
1996
Jae Ho Kim
Jae-Gap Lee
Chung-Su Ji
Sang Jun Park
Chang-Su Kim
Eun-Gu Lee
Keywords:
Metalorganic vapour phase epitaxy
Metallurgy
Materials science
Tin
Correction
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