Texture and grain structure in polycrystalline silver films deposited by partially ionised beam

The analysis of grain growth mechanisms is carried out by the investigation of the correlation between texture and average grain size in polycrystalline silver films deposited by e-beam evaporation. The results indicate that the ion bombardment can enhance the texture evolution by changing the driving force for abnormal grain growth. This effect is attributed to the enhanced desorption of impurities from the free surface of the films due to ion bombardment.