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Preparation of Bi2Sr2Can-1CunOy Thin Films applying the Bias Voltage to the Substrate by rf Magnetron Sputtering
Preparation of Bi2Sr2Can-1CunOy Thin Films applying the Bias Voltage to the Substrate by rf Magnetron Sputtering
1997
Takafumi Maruyama
Kanji Harada
Satoru Kishida
Heizo Tokutaka
Kikuo Fujimura
Keywords:
Thin film
High-power impulse magnetron sputtering
Substrate (chemistry)
Sputter deposition
Biasing
Analytical chemistry
Chemistry
Atomic physics
Optoelectronics
Correction
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