Multimode Interference 3-dB Coupler in Silicon-on-Insulator Based on Silicon Rib Waveguides with Trapezoidal Cross Section

A 3-dB multimode interference optical coupler based on rib waveguides with trapezoidal cross section was designed and fabricated on silicon-on-insulator wafer. Potassium hydroxide (KOH) anisotropic chemical etching of silicon was used to fabricate the waveguides to obtain smooth interface. A modified finite-difference beam propagation method was used to simulate the multimode rib waveguide with slope interfaces. The rms roughness of etching interface is as small as 1.49nm. The propagation loss of the waveguide is 1.3dB/cm at wavelength of 1.55μm. The fabricated 3-dB coupler has a good uniformity of 0.2 dB.