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Development of imprint materials for the step and flash imprint lithography process
Development of imprint materials for the step and flash imprint lithography process
2004
Frank Y. Xu
Nick Stacey
Michael Watts
Truskett Van Truskett
Ian M. Mcmackin
Jin Choi
Philip Schumaker
Ecron Thompson
Dan Babbs
Sidlgata V Sreenivasan
Carlton G Willson
Norman E. Schumaker
Keywords:
Nanotechnology
Materials science
lithography process
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