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Effect of methane and acetaldehyde precursor on the microstructures of pyrocarbon films grown on quartz substrates
Effect of methane and acetaldehyde precursor on the microstructures of pyrocarbon films grown on quartz substrates
2021
Tiyuan Wang
Hejun Li
Kun Li
Qingliang Shen
Wei Li
Song Qiang
Shouyang Zhang
Keywords:
Chemical engineering
Materials science
Methane
Acetaldehyde
Microstructure
Quartz
Correction
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