A procedure for solving inverse problems of synthesis and characterization of multilayer optical coatings with a protective film

A mathematical model for problems of optics for a layered medium with heterogeneous layers is discussed. Inverse problems of synthesis and optical characterization of layered media are stated as mathematical optimization problems and a solution to the same is discussed. Specialized software has been developed to enable solving these problems within the framework of the proposed model. The influence of volumetric nonuniformity of the carbon layer on the photometric and ellipsometric characteristics has been demonstrated theoretically. Modeling has been performed for heterogeneous multilayer interference coatings with a diamond-like top layer which serves as a functionally active optical layer as well as a protective film.