Theoretical simulation and experimental study of phosphorus concentration profiles in laser doped crystalline silicon solar cells

In this paper, a nonlinear numerical model of laser heating on crystalline silicon solar cells has been established based on the thermodynamic method. According to the non-steady temperature field gained by finite difference method, variation characteristics of melt front as a function of time are described during laser melting of crystalline silicon. Considering the features of liquid phase diffusion of phosphorus atoms in melting silicon, theoretical simulation for phosphorus diffusion behavior and the evolution of phosphorus concentration profiles at various times are achieved by the image method. The theoretical phosphorus concentration profile is in good agreement with the corresponding experimental ECV data.