Large-stroke MEMS deformable mirrors for adaptive optics

Surface-micromachined deformable mirrors that exhibit greater than 10 /spl mu/m of stroke are presented. The segmented arrays described here consist of 61 and 85 hexagonal, piston/tip/tilt mirrors (three actuators each) with diameters of 500 and 430 /spl mu/m, respectively, and fill a 4 mm circular aperture. Devices were packaged in 208 and 256 pin-grid arrays and driven by a compact control board designed for turn-key operation. After metallization and packaging mirror bow is /spl sim/680 nm (/spl lambda//1), but a heat-treatment procedure is proposed for controlling mirror curvature to better than /spl lambda//10. An optical test bed was used to demonstrate basic beam splitting and open-loop aberration correction, the results of which are also presented.