Old Web
English
Sign In
Acemap
>
Paper
>
Parametric Studies Of Electron-energy -distribution-function And Rate Constants For Plasma-etching Reactors
Parametric Studies Of Electron-energy -distribution-function And Rate Constants For Plasma-etching Reactors
1994
J. W. Shon
E. Meeks
R.J. Kee
Keywords:
Nuclear magnetic resonance
Atomic physics
Physics
Capacitively coupled plasma
Reaction rate constant
Inductively coupled plasma
Distribution function
Electron
Plasma etching
Electromagnetic electron wave
Inductor
Parametric statistics
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]