Low-loss, MEMS based, broadband phase shifters

Broadband, true time delay phase shifters based on MEMS switches provide the high instantaneous bandwidth desired for applications such as multi-frequency antenna arrays with multiple functions such as radar, communications, and ECM. MEMS based phase shifters offer significant performance advantages compared to technologies using PIN diode or MESFET switches including high linearity that does not limit the dynamic range of the receiver in a crowded signal environment. Furthermore, MEMS phase shifters offer a combination of low RF insertion loss and low switch control power consumption that is unmatched by PIN diode or MESFET technologies, giving the MEMS phase shifters a decided advantage at reducing prime power consumption in airborne or space based systems. Radant MEMS Inc., employing its high power 10 Watt MEMS switch with a demonstrated 1 trillion cycle lifetime, designed, fabricated and tested a 6-bit, 5 Watt, true time delay, 1–6 GHz, MEMS phase shifter that, with the exception of the three longest delay lines, was integrated on a single silicon die. This compact, low cost phase shifter is hermetically sealed using the same wafer capping process now employed for Radant's MEMS switches.