Study on Material Processing by Focused Extreme Ultraviolet Pulse towards Direct Micro/Nano-Fabrication

We have been studying the direct material processing by a focused extreme ultraviolet (XUV) pulse for further precise fabrication of the material by laser. Both free electron laser and high order harmonic generation sources were tested for the material processing. The experimental setup, the recent results of material processing by XUV pulse and future prospective will be presented at the conference.