Manufacturing method of display substrate, display substrate and display device

The invention provides a manufacturing method of a display substrate, the display substrate and a display device. The manufacturing method includes the steps that a first material layer and a second material layer are sequentially deposited on a substrate body; a first etching protecting pattern is manufactured on the second material layer through a mask; the second material layer protected with the first etching protecting pattern is etched with a second etching solution, and a second etching protecting pattern formed by the residual second material layer is obtained; the first material layer protected with the second etching protecting pattern is etched with a first etching solution, and a functional pattern formed by the residual first material layer is obtained, wherein the first material layer cannot be etched with the second etching solution. According to the manufacturing method, the functional pattern smaller in size can be manufactured; if the functional pattern is a light-proof pattern arranged in a display area, the light transmittance of the display device can be increased; if the functional pattern is arranged in a frame area of the display device, the area of a frame can be reduced, and therefore a narrow-border structure is achieved.