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Sputtered Silicon Nitride Thin Films for Non-Volatile Memory Applications
Sputtered Silicon Nitride Thin Films for Non-Volatile Memory Applications
2011
Matheus Coelho Adam
Artur Vicente Pfeifer Coelho
Marcelo Barbalho Pereira
H. Boudinov
Keywords:
Silicon nitride
Thin film
Non-volatile memory
Physical vapor deposition
Composite material
Materials science
Optoelectronics
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