Al film patterning on poly-carbonate by F2 laser irradiation

In recent years, polycarbonate (=PC) is gathering attention as a light and strong material for smart windows. In the presentation, a patterning method of Al deposited film on silicone hard-coated polycarbonate by 157 nm F2 laser irradiation will be reported. A photomask placed on Al thin film and irradiated by F2 laser and the non-irradiated area was removed by KOH aq. The mechanism of the patterning will be discussed based on XPS, AFM, and ATR-FTIR measurement.