Étude théorique et expérimentale des distributions angulaires et énergétiques corrélées d'électrons rétrodiffusés par des cibles d'or et de silicium dans un microscope à balayage

An original device, previously described [1,2] allows to determine the fraction of normally incident electron beam on a bulk specimen that is backscattered in a given direction θ, with an energy E less than or equal to the incident energy E0. We have deduced from the experimental results the different angular and energetic distributions of backscattered electrons; in certain cases, a normalisation of these distributions is performed. So, we show off properties of the backscattering phenomenon that are independent of the target material and of the energy range under study. The last part presents the results of Monte-Carlo simulation. Their comparison with the experimental results allows to validate this model.