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Analysis of Ti Self-Passivation on Silver Interconnects for ULSIs Applications
Analysis of Ti Self-Passivation on Silver Interconnects for ULSIs Applications
1993
Tadashi Iijima
Hisako Ono
N. Ninomiya
Yukihiro Ushiku
T. Hatanaka
Akira Nishiyama
Hiroshi Iwai
Keywords:
Nanotechnology
Passivation
Materials science
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