Mechanistic study of ultralow k-compatible carbon dioxide in situ photoresist ashing processes. I. Process performance and influence on ULK material modification

In situ photoresist (PR) ashing processes are attractive because of the ease of process integration with plasma etching processes. The authors have examined the performance of carbon dioxide (CO2) as a source gas for in situ PR ashing processes compatible with ultralow k (ULK) materials and compared it with the results obtained using O2. They performed measurements of 193 nm PR ashing rates in a dual frequency capacitively coupled plasma reactor. The damage to porous ULK feature sidewalls was simulated by exposing blanket ULK films in a non-line-of-sight fashion in a small gap structure to the plasma-generated reactants. The pressure for the in situ ashing processes was varied from 10 to 100 mTorr, and the self-bias voltages ranged from floating potential to ∼−400 V. To increase line-of-sight etching of PR by inert ion bombardment, Ar/CO2 mixtures with up to 75% Ar were investigated. The ULK material modifications were analyzed by x-ray photoelectron spectroscopy and time-of-flight secondary ion mass spec...