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Characterization of a nano line width reference material based on metrological scanning electron microscope
Characterization of a nano line width reference material based on metrological scanning electron microscope
2021
Fang Wang
Yushu Shi
Wei Li
Xiao Deng
Xinbin Cheng
Zhang Shu
Xixi Yu
Keywords:
Optoelectronics
Nano-
Metrology
Scanning electron microscope
line width
characterization
Materials science
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