Thermal and oxidation stability of TixW1−x diffusion barriers investigated by soft and hard x-ray photoelectron spectroscopy

C.K. acknowledges the support from the Department of Chemistry, UCL. N.K.F. acknowledges support from the Engineering and Physical Sciences Research Council (No. EP/L015277/1). J.J.G.M. and S.M. acknowledge the support from the FusionCAT project (No. 001-P-001722) co-financed by the European Union Regional Development Fund within the framework of the ERDF Operational Program of Catalonia 2014–2020 with a grant of 50% of total cost eligible, the access to computational resources at MareNostrum and the technical support provided by BSC (No. RES-QS-2020-3-0026). L.E.R. acknowledges support from an EPSRC Early Career Research Fellowship (No. EP/P033253/1) and the Thomas Young Centre under Grant No. TYC-101. A.R. acknowledges the support from the Analytical Chemistry Trust Fund for her CAMS-UK Fellowship. We acknowledge Diamond Light Source for time on Beamline I09 under Proposal No. SI19885-1. The authors would like to thank Dave McCue, I09 beamline technician, for his support of the experiments.