Oxygen-deficiency and OH changing of fused silica induced by the 248nm pulsed laser

The Oxygen-deficiency and the content and structure of OH had been proved to lead to various laser-irradiated damage threshold. In order to get the principle, we detected the changing tendency of the the Oxygen-deficiency and OH content after the irradiation without damaging. The results showed that the increasing of the Oxygen-deficiency and decreasing of the OH .Which is the result of the structure-collapsing and the effect to delaying the collapsing by Oxygen-deficiency and OH.