Green Production of Lead-free Bzt-bct Thin Films for Applications in Mems Devices

This paper reports the production of Lead-free (1-x)(BaZr0.2Ti0.8O3)-x(Ba0.7Ca0.3O3) ferro/piezoelectric thin films by means of repeated chemical solution deposition routes. Two different kinds of precursor solutions were compared: i) a literature standard precursor solution involving the use of 2-methoxyethanol (2-MOE) which is a toxic and carcinogenic solvent and ii) a “greener” precursor solution based on 1-methoxy-2-propanol (PGME), a non-toxic and non-carcinogenic solvent. Morphology, crystal structure and ferroelectric behavior of the films is also reported.