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Analysis of the Gas Phase Epitaxy of Silicon Carbide as a Basic Process for Power Elec-tronics Technology. Review
Analysis of the Gas Phase Epitaxy of Silicon Carbide as a Basic Process for Power Elec-tronics Technology. Review
2020
A. V. Afanasev
V. A. Ilyin
V.V. Luchinin
S.A Reshanov
Ascatron Ab, Kista – Stockholm, Sweden
Keywords:
Materials science
Epitaxy
Silicon carbide
Engineering physics
gas phase
technology review
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